Our technical writers write manuals about semiconductor instrumentation and processing equipment, including cassette-to-cassette sputtering, electron-beam, photolithography mask, plasma etching, and chemical vapor deposition (CVD) systems. This Varian maintenance manual describes a cassette-to-cassette sputtering system.

• Length: 302 pages
• Audience: Semiconductor process-line managers
• Service Performed: Complete original manuscript and figure concepts
• Related Project: 3190 Cassette-to-Cassette Sputtering System Operations Manual (9 Kbyte HTML)